ANODE JOINING STRUCTURE, METHOD OF MANUFACTURE AND METHOD OF MANUFACTURING OPTICAL SCANNER USING THIS STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical scanner allowing stable operation. SOLUTION: This anode joining structure has a base board 23 and a glass pane 25 arranged on an upper part of the base board 23, and is constituted such that at least one or more layers of metallic films 21 and dielectric films 22 are laminated between the base board 23 and the glass pane 25 so that the uppermost part becomes the dielectric film 22, and the dielectric film 22 of the uppermost part and the glass pane 25 are anodically joined. This manufacturing method of the anode joining structure is composed of a stage for forming a dielectric in the uppermost part by depositing at least one or more layers of dielectrics and metallic films between the base board and the glass pane and a stage for anodically joining the dielectric of the uppermost part and the glass pane, and thereby, forms a structure for laminating the metallic film and the dielectric between the base board and the glass pane. Since stable performance is embodied by anodically joining the dielectric and the glass pane and the dielectric and the metallic film, various MEMS elements are manufactured. COPYRIGHT: (C)2004,JPO