| 摘要 |
PROBLEM TO BE SOLVED: To form a magnetic thin film containing an alloy of a regular phase having a face centered tetragonal based crystalline structure on a substrate through a heat treatment process while preventing the substrate from being damaged by to heat. SOLUTION: A magnetic recording medium 1 has the substrate 2, a base layer 3, a magnetic layer 4, a protection layer 5, and a lubrication layer 6 which are sequentially stacked on one side of the substrate 2. The magnetic layer 4 is made of the magnetic thin film containing an FePt alloy of an regular phase having the face centered tetragonal based crystalline structure. The magnetic thin film is formed by using the sputtering method to form the thin film containing an FePt alloy of the irregular phase having the face centered tetragonal based crystalline structure and thereafter by applying heat treatment to the thin film. In the heat treatment, the thin film in the thin film and the substrate 2 is placed nearer to a heat source and the temperature rising speed of the substrate 2 is selected to be 7°C/ min or over for a period until the temperature of the substrate 2 reaches a prescribed temperature. COPYRIGHT: (C)2004,JPO
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