CARBON-MADE TOOL FOR HEATING LIQUID CRYSTAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a carbon-made tool for heating a liquid crystal substrate which has soaking properties, can suppress fine powder of graphite and can reduce the warpage of the liquid crystal substrate. SOLUTION: The carbon-made tool for heating the liquid crystal substrate is used for heating the liquid crystal substrate and is≤0.03(%) in flatness ratio (in which the difference in height between a most projected part and a most recessed part is divided by the longest length in the heating direction and multiplied by 100 to obtain percentage). COPYRIGHT: (C)2004,JPO