| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an accurately heatable heating element made of high purity MoSi<SB>2</SB>or WSi<SB>2</SB>and its manufacturing method causing no accident such as short circuit by arranging the MoSi<SB>2</SB>or WSi<SB>2</SB>plate-like heating element in close contact on the bottom wall, upper wall and side wall of a heating furnace. <P>SOLUTION: This heating element is composed of MoSi<SB>2</SB>or WSi<SB>2</SB>not less than 80 wt.% as a main component, a residual part of SiO<SB>2</SB>and an impurity, and has the content of Fe, Cr and Ni of the impurity not more than 100 wtppm, and is characterized by having one of a circular arc shape, a wave shape, V shape, U shape or rectangular shape or a plurality of combination shapes of those on the same plane obtained by pressurizing-sintering the material powder of the heating element. <P>COPYRIGHT: (C)2004,JPO |
