| 摘要 |
PROBLEM TO BE SOLVED: To effect proper and stable process control at all times in such a way as to prevent hunting even if the range of control is greatly changed when an opening/closing control signal adapted to the current opening of a valve is output to the valve. SOLUTION: A deviationεbetween the current flow value PV and a set flow value SV is computed and computations for PID control are performed according to the deviationε. A value obtained by multiplying a PID control computation value by a correction factor matching the opening of the valve at that time in a manner corresponding to the characteristics of the valve is output as the opening/closing control signal for the valve. COPYRIGHT: (C)2004,JPO
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