System and method for mass flow detection device calibration

摘要

Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method comprises providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF0(1+aF+bF<2>+cF<3>)), for device variations in sensor sensitivity (1+alphaDeltaR), and for variations in the split flow of fluid through the flow meter (1-betaDeltaADC(Sp/100)<2>). The sensor and split flow correction factors may be used independently of each other in some embodiments.