| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small-sized and high-speed optical modulation device with less operation point shift due to thermal drifts, and its manufacturing method. <P>SOLUTION: This optical modulation device is composed of an optical waveguide (2) formed on a substrate (1) which has an electrooptic effect for guiding incident light, a first buffer layer (5) covering the upper surface of the substrate, a conductive film (6) formed so as to cover the upper part of the first buffer layer, a second buffer layer (8b) formed at one end part of the upper surface of the conductive film, and a center electrode and a ground electrode for applying a voltage in order to induce an electric field in the optical waveguide. Also, it is provided with the center electrode (3a) formed in contact with the center part of the upper surface of the conductive film without contacting the second buffer layer and the ground electrode (4c) formed in contact with the second buffer layer without contacting the conductive film, and the light guided through the optical waveguide is modulated by changing a phase by the voltage applied to the optical waveguide. <P>COPYRIGHT: (C)2004,JPO</p> |
