| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost and robust mechanical system which highly precisely positions beam for a rotational electron beam mastering device. SOLUTION: A rotating table 31 holding a sample 6 is driven to rotate by a rotation motor 28 and is linearly driven by a translatory motor 43. A ball bearing 27 is used as a bearing for a rotating shaft 40, a fluctuation of rotation in a radius direction is measured by volume displacement gages 44a, 44b, and a deviation from a targeted value in a translatory movement is detected by a laser measuring apparatus 47. By inputting a volume of the measurement error into an error detection/correction circuit 48, adding two kinds of error volumes to make up a deflection signal 25, and inputting it into an electrostatic deflection electrode 15, the electron beam 10 is positioned in precision. COPYRIGHT: (C)2004,JPO
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