发明名称 Fixed matching network with increased match range capabilities
摘要 A matching network for performing frequency tuned matching between a source and a load. The matching network includes a first capacitor and first inductor, having fixed values, coupled in series from an input port to an output port. A second capacitor and second inductor, having fixed values, is coupled in series from one of the input port and output port to ground. The input port is adapted to receive a variable frequency RF signal and the output port is adapted to be coupled to a time-variant load impedance. The values of the first inductor and first capacitor are related by a first mathematical relationship, and the values of the second inductor and second capacitor are related by a second mathematical relationship. The substantial impedance range of the matching network enables a match to be maintained over a large fluctuation in load impedance.
申请公布号 US2004027209(A1) 申请公布日期 2004.02.12
申请号 US20030379306 申请日期 2003.03.03
申请人 APPLIED MATERIALS, INC. 发明人 CHEN JIN-YUAN;HOOSHDARAN FRANK F.;JUN DOUG S.
分类号 H01J37/32;H03H7/38;H03H21/00;(IPC1-7):H03H7/40 主分类号 H01J37/32
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