发明名称 |
Clamping element with an integrated force sensor |
摘要 |
A clamping element for the transport of a substrate in a predefined transport direction comprises a first and a second leg with a first and second clamping jaw for clamping a substrate. Each of the two clamping jaws has a clamping plate which is movable in transport direction relative to the corresponding leg. A sensor measures the deflection of the first clamping plate relative to the first leg. As soon as the measured deflection exceeds a predefined threshold value, the clamping element is opened.
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申请公布号 |
US2004025605(A1) |
申请公布日期 |
2004.02.12 |
申请号 |
US20030606146 |
申请日期 |
2003.06.24 |
申请人 |
ESEC TRADING SA, A SWISS CORPORATION |
发明人 |
HESS PETER;BERNHARDSGRUETER RAPHAEL;GREBER ALEXANDER;GUJER HANSJORG;ONDA NICOLINO |
分类号 |
H01L21/60;G01L5/00;G01M99/00;H01L21/00;H01L21/687;(IPC1-7):G01M19/00 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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