Method for producing an actuator

摘要

In sensor prodn. by layer deposition on a surface below a mask which is and remains fixed to this surface, the novelty is that a cavity exists between the mask and the surface and deposition is carried out in various directions to allow overall coating below the mask, i.e. without any part of the mask casting a central deep shadow on the surface during deposition. Also claimed is sensor prodn. by closing all or most of the openings of a mask which is and remains fixed to a substrate, in which a cavity exists between the mask and the substrate and in which the openings are closed by deposition.