| 摘要 |
<p>PURPOSE: A panel carrying and evacuating cart is provided to automate handling tip pipes and flat panels and to prevent the position deviation between a tip pipe and a tip pipe-sealing part in a flat panel, and the damage to the tip pipe. CONSTITUTION: A panel carrying and evacuating cart(1) for a flat panel-manufacturing apparatus is evacuatably and gas-feedably formed. The cart(1) is provided with an evacuation head(25) holding a tip pipe(24) and a panel-containing magazine(13) which supports a horizontally placed flat panel(P) on panel supports(28A,28B) disposed on a plurality of positions. The tip pipe(24) is sealed, and the flat panel is evacuated through the tip pipe and the evacuation head and injected with a gas, and then the tip pipe is sealed, cut to be closed. The panel supports(28B) other than the particular panel supports(28A) near the tip pipe(24) are horizontally more movable against the flat panel than the panel supports(28A).</p> |
