发明名称 Device for adjusting the position of a specimen carrier
摘要 <PICT:1076814/C6-C7/1> A device for adjusting the position of a specimen carrier 1, which is freely rotatable about two axes A, C arranged in perpendicular relation to each other and is located within a treatment chamber, e.g. for vaporising objects in high vacuum for the purpose of preparing specimens for electron microscopy as well as for the production of metallic or non-metallic coatings or other layers, comprises two individually rotatable driving shafts, 5', 6' arranged in concentrical relation to each other and extending through the wall of the chamber, the rotation of the specimen carrier about its two axes of rotation being derived from the driving shafts. The specimen carrier is additionally orientable about a third axis B arranged in perpendicular relation to one or the other two axes, thus allowing it to be elastically pressed against a cooling body provided in the treatment chamber. The specimen carrier is held in a gimbal suspension and rotated by bevel gears. In an alternative embodiment, rotation of the specimen carrier about the third axis is obtained by sliding one shaft relative to another.
申请公布号 GB1076814(A) 申请公布日期 1967.07.26
申请号 GB19640038553 申请日期 1964.09.22
申请人 SIEGFRIED GESSNER;FRITZ GRASENICK 发明人
分类号 C23C14/50;G01N1/28 主分类号 C23C14/50
代理机构 代理人
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