发明名称 CLAMPING APPARATUS HAVING AIR BOOSTER AND REGULATOR FOR CONTROLLING FINE PRESSURE
摘要 PURPOSE: A clamping apparatus having an air booster and a regulator for controlling fine pressure, is provided to be capable of constantly conserving the uniformity of the fine pressure. CONSTITUTION: A clamping apparatus is provided with a regulator(1), an air booster(4) for transmitting amplified air pressure to predetermined side, an installing value input part for inputting aiming pressure to a clamp(9), and a air pressure detecting part. The clamping apparatus further includes an air pump for controlling air pressure according to the resultant value of the air pressure detecting part, a fluid pressure controlling part, and pressure transmission part for transmitting the oil pressure of the fluid pressure controlling part to a structure for clamping.
申请公布号 KR20040013032(A) 申请公布日期 2004.02.11
申请号 KR20040001366 申请日期 2004.01.09
申请人 HYDRAULICS AND PNEUMATICS TECHNICAL SYSTEM CO., LTD. 发明人 LEE, SEONG GI;LEE, YEONG GI
分类号 H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/56
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