WAFER SUPPORT PART ADOPTED IN WAFER BACKSIDE INSPECTING EQUIPMENT

摘要

PURPOSE: A wafer support part adopted in wafer backside inspecting equipment is provided to be capable of improving the compatibility of the wafer support part for a variety of wafer backside inspecting equipment. CONSTITUTION: A wafer support part adopted in wafer backside inspecting equipment is provided with a wafer stage(110) for loading a wafer and a plurality of stage pins(150) protruded from the upper portion of the wafer stage for supporting the edge portion of the wafer. Preferably, no pattern is formed at the edge portion of the wafer. Preferably, optical type inspection equipment or electron beam type inspection equipment is used as the wafer backside inspecting equipment.