DIFFUSION EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: Diffusion equipment for manufacturing a semiconductor device is provided to be capable of prolonging cleaning cycle and improving the operating ratio and productivity of the diffusion equipment. CONSTITUTION: Diffusion equipment for manufacturing a semiconductor device is provided with a flange body part(12) for supporting the lower portion of a bell type outer tube and a protruding part formed along the inner wall of the flange body part for supporting the lower portion of an inner tube. The diffusion equipment further includes a plate capable of being attached to the lower portion of the flange body part, an exhaust part(32) prolonged to the outer portion through a predetermined portion of the flange body part, and pipe type liners(34a,34b) corresponding to the inner wall of the exhaust part.