Capillary-channel probes for liquid pickup, transportation and dispense using spring beams

摘要

Fluidic conduits (330A), which can be used in microarraying systems (300), dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes (350) that include at least one capillary channel (351). Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels (351) can either be integrated into the spring beams (300) or formed on the spring beams. Capillary forces produced by the narrow channels (351) allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.