| 摘要 |
PURPOSE: A driving apparatus of a liquid drop discharge head, a film deposition system, a driving method of the liquid drop discharge head, a method for depositing film, and a method for manufacturing electronic apparatuses and devices are provided to discharge liquid drops stably from the liquid drop discharge head for a long time by restricting deterioration of a piezoelectric oscillator. CONSTITUTION: A driving apparatus of a liquid drop discharge head(4) comprises a piezoelectric oscillator(20) expanding and contracting with the specific driving waveform, a drive control circuit(10) as a drive control unit, and a driving waveform generating circuit(30). The drive control circuit generates the curved driving waveform having no sharp edge based on a waveform being generated from the driving waveform generating circuit and drives the piezoelectric oscillator.
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