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发明名称
Low dielectric constant layers
摘要
申请公布号
GB0400229(D0)
申请公布日期
2004.02.11
申请号
GB20040000229
申请日期
2002.07.15
申请人
TRIKON HOLDINGS LIMITED
发明人
分类号
H01L21/768;C23C16/40;C23C16/56;H01L21/316;H01L23/522
主分类号
H01L21/768
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代理人
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