EXHAUST MONITORING SYSTEM OF SEMICONDUCTOR EQUIPMENT AND METHOD FOR MONITORING THE SAME

摘要

PURPOSE: An exhaust monitoring system of semiconductor equipment and a method for monitoring the same are provided to be capable of monitoring exhaust in real time. CONSTITUTION: An analog signal is generated after measuring exhaust pressure(S10). The analog signal is converted into corresponding digital data(S20). Whether the exhaust pressure is off from a reference exhaust pressure extent, or not, is decided according to the digital data(S30). When the exhaust pressure is off from the reference exhaust pressure extent, an interlock signal is generated(S40). Preferably, an alarm is generated after the interlock signal(S50) is generated. Preferably, an equipment abnormality message is displayed after the interlock signal(S60) is generated.