发明名称 WAFER LABELING TABLE
摘要 PURPOSE: A wafer labeling table is provided to prevent the damage of a wafer caused by dust which is adhered on the surface of the wafer labeling table by minimizing contact area between a wafer and the wafer labeling table. CONSTITUTION: A wafer labeling table includes a circular center table(101) and a peripheral table(103) formed around the circular center table(101). A vacuum groove(105) is formed at the boundary between the circular center table(101) and the peripheral table(103). A plurality of loading sides(111,112) are formed on the circular center table. A region between the loading sides(111,112) is dug as much as the predetermine depth from the loading sides(111,112). An anti-vacuum hole(115) is formed on the dug region between the loading sides.
申请公布号 KR20040011923(A) 申请公布日期 2004.02.11
申请号 KR20020045243 申请日期 2002.07.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, YEON SANG;CHO, YEONG IL;HWANG, YEONG GON;KIM, CHEOL MIN;KWON, MOK GEUN;LEE, HYEONG JIN
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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