发明名称 |
Laser inspection apparatus |
摘要 |
A laser inspection apparatus has a light source 13 for outputting laser beam, application means 5, 33, 34 for irradiating the laser beam 7 output from the light source 13 to any desired position of a detected body 21, first detection means 2 for detecting fluorescence 8 generated from the detected body 21 to which the laser beam 7 is applied, and second detection means 3 for detecting reflected light 8 scattered on a surface of the detected body 21 to which the laser beam 7 is applied.
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申请公布号 |
US6690024(B1) |
申请公布日期 |
2004.02.10 |
申请号 |
US20000618721 |
申请日期 |
2000.07.18 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
FUNAOKA KOJI;SAKAMOTO MASAHIKO;TAKENO SHOZUI;SASAI HIROSHI |
分类号 |
H05K3/00;G01B11/24;G01B11/30;G01N21/47;G01N21/64;G01N21/88;G01N21/956;(IPC1-7):G01N21/88 |
主分类号 |
H05K3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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