发明名称 A method of testing the continuity of a layer of electrically resistive material
摘要 1,081,858. Testing for cracks in materials. SPERRY RAND CORPORATION. Nov.23, 1965 [Nov.23, 1964], No.49686/65. Heading G1S. In a method of testing the continuity of a layer of relatively low conductivity which covers a surface of relatively high conductivity, e.g. in semiconductor devices comprises the steps of covering the layer with an electrolyte, setting upon E.M.F. between a first electrode in said electrolyte and said surface as a second electrode, arranged so as to cause electro-deposition of material in the neighbourhood of any discontinuities and detecting the presence of such material by current flow or visually using a microscope. Copper or nickel electrolytic plating solution may be used.
申请公布号 GB1081858(A) 申请公布日期 1967.09.06
申请号 GB19650049686 申请日期 1965.11.23
申请人 SPERRY RAND CORPORATION 发明人
分类号 G01N27/42;H01L23/29 主分类号 G01N27/42
代理机构 代理人
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