| 摘要 |
FIELD: suspension of sensitive masses in integrated accelerometers or microgyroscopes. SUBSTANCE: elastic suspension has separately made bearing and current conducting elements with conducting tracks connecting sensitive mass with frame of instrument and placed at right angle to one another. Longitudinal axes of current conducting elements coincide with neutral plane of bending of bearing elements. EFFECT: increased precision of instrument thanks to reduced hysteresis and temperature deformations of suspension. 1 dwg |
