发明名称 Electrostatic pressure transducer and a method thereof
摘要 A pressure transducer system includes a housing with a chamber, a member with a stored electrical charge, and a pair of electrodes that are at least partially in alignment with each other. At least a portion of the chamber is at a reference pressure. The member is connected to the housing and extends across at least a portion of the chamber. Each of the pair of electrodes is connected to the housing and is spaced from and on substantially opposing sides of the member. The member is movable with respect to the pair of electrodes or one of the pair of electrodes is movable with respect to the member in response to a monitored pressure.
申请公布号 US6688179(B2) 申请公布日期 2004.02.10
申请号 US20020280264 申请日期 2002.10.24
申请人 NTH TECH CORPORATION 发明人 POTTER MICHAEL D.;MARTENS ALEXANDER E.
分类号 G01L9/00;(IPC1-7):G01L7/00 主分类号 G01L9/00
代理机构 代理人
主权项
地址