发明名称 |
Vaporizer delivery ampoule |
摘要 |
A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers (22) for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances (30) extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers. |
申请公布号 |
AU2003245757(A8) |
申请公布日期 |
2004.02.09 |
申请号 |
AU20030245757 |
申请日期 |
2003.07.01 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
JOHN GREGG;MARIANNE FUIERER;JEFFREY I. BANTON;SCOTT BATTLE;DONN NAITO |
分类号 |
C23C16/448 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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