| 摘要 |
PURPOSE:To obtain a soft magnetic thin film which is high in saturation magnetic flux density and a displays enough soft magnetic properties even after it is thermally treated by a method wherein the magnetic thin film is formed of material which is represented by a composition formula, (FeaRubGacSid)xNyOzCw, in a prescribed range of composition and set to a certain value or below in average crystal grain diameter. CONSTITUTION:A soft magnetic thin film is formed of material which is represented by a composition formula, (FeaRubGaaSid)xNyOzCw, where the range of composition is so set as to satisfy formulas, 68<= a<=90, 0.1<=b<=10, 0.1<=c<=15, 10<=d<=25, 80<=x<=100, 0<=y<=20, 0<=z 20, 0<=w<=20, a+b+c=100, and x+y+z+w=1O0, and set to 600Angstrom or below in average crystal grain diameter. At this point, a-d, x-z, and w denote the rates (atom %) of elements respectively. For instance, in a soft magnetic thin film whose composition is represented by a formula, (Fe76.7Ru4Ga5.5Si13.8)100-zOz (0<=z<=20), the thin film is made to change in average crystal grain diameter by changing it in oxygen content. The change of the film concerned in coercive force Hc with the change in average crystal grain diameter is shown by the graph, where the coercive force He starts to decrease when the film concerned is 600Angstrom or so in average crystal grain diameter. |
