发明名称 |
INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL |
摘要 |
The present invention relates to a semiconductor processing system that employs infrared-based thermopile detector for process control, by analyzing a material of interest, based on absorption of infrared light at a characteristic wavelength by such material. In one embodiment, an infrared light beam is transmitted through a linear transmission path from an infrared light source through a sampling region containing material of interest into the thermopile detector. The linear transmission path reduces the risk of signal loss during transmission of the infrared light. The transmission path of the infrared light may comprise a highly smooth and reflective inner surface for minimizing such signal loss during transmission. |
申请公布号 |
AU2003276827(A1) |
申请公布日期 |
2004.02.09 |
申请号 |
AU20030276827 |
申请日期 |
2003.05.05 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
JOSE ARNO |
分类号 |
C23C16/52;G01N21/35;H01L21/00;H01L21/205 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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