| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe for measuring plasma density information that is low in dependency on an arrangement direction, a method and a device for measuring plasma density information using the probe, and a method and device for plasma treatment using the probe. <P>SOLUTION: The probe 7 for measuring plasma density information is constituted by shaping the front end of a coaxial cable 10 coated with a tube 19 made of a dielectric substance. At the front end of the cable 10, a center conductor 10d of the cable 10 functions as an antenna. The tube 19 is formed in a spherical shape in the vicinity of the antenna, and the center conductor 10d is also formed in a spherical shape at the front end of the cable 10 which functions as the antenna. When the probe 7 is constituted in this way, the idependency on the arrangement direction of the probe 7 can be lowered. <P>COPYRIGHT: (C)2004,JPO |
