发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device comprising a high withstand voltage MOS transistor which is never affected by a characteristic change caused by hot carriers and kept superior in transistor characteristics. SOLUTION: The semiconductor device comprises a MOS transistor having an LDD structure which is equipped with a gate electrode formed on the surface of a semiconductor substrate through the intermediary of a gate oxide film; and source/drain regions that are formed inside the semiconductor substrate as sandwiching the gate electrode between them, composed of low-concentration impurity regions and high-concentration impurity regions higher than the low-concentration impurity regions in impurity concentration, and formed in the low-concentration impurity regions. The gate oxide film is extended from the side edges of the gate electrode in bilateral directions so as to cover the surfaces of the low-concentration impurity regions. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004039681(A) 申请公布日期 2004.02.05
申请号 JP20020190817 申请日期 2002.06.28
申请人 FUJI FILM MICRODEVICES CO LTD;FUJI PHOTO FILM CO LTD 发明人 NOGUCHI AKIRA
分类号 H01L27/092;H01L21/8234;H01L21/8238;H01L27/088;H01L29/78;(IPC1-7):H01L29/78;H01L21/823 主分类号 H01L27/092
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