METHOD FOR MANUFACTURING MULTILAYERED PLATE AND HARD DISK SUSPENSION MULTILAYERED BODY

摘要

PROBLEM TO BE SOLVED: To meet the demand of developing a technology capable of making uniform processing on both sides particularly when a resin layer is processed from both surfaces by wet etching in the multilayered plate of a structure having a resin layer in which thermoplastic polyimide layers are formed on both surfaces of a non-thermoplastic polyimide layer. SOLUTION: A manufacturing method is provided for a multilayered plate 100 wherein the thickness d1 of a thermoplastic polyimide layer 20 on a large surface roughness side is secured larger than a thermoplastic polyimide layer 30 on a small rough surface side corresponding to a difference in surface roughness between the thermoplastic polyimide layers 20 and 30 on both sides of a resin layer 60, and etching is similarly progressed on both sides of the resin layer 60 according to a difference in thickness, and a hard disk suspension multilayered body. COPYRIGHT: (C)2004,JPO