| 摘要 |
PROBLEM TO BE SOLVED: To provide a gate valve for vacuum capable of suitably maintaining a high seal performance and the highly clean environment for a long time by preventing a valve body inclination due to a pressure difference, and lessening a metallic particle produced by a contact of a valve body and a valve box in the gate valve for partitioning the space with the pressure difference. SOLUTION: Backing plate members 26 and 27 are arranged on a side of a valve body 5. Backing plate members 23 and 25 are arranged on the side of valve body main body 2 corresponding to the backing plate members 26 and 27. Tapered Guide slopes 29 and 30 are provided on the backing plate members 26 and 27. The guide slopes 29 and 30 are brought in contact with each other so as to support the valve body 5 in the valve closed state inside a valve box main body 2. COPYRIGHT: (C)2004,JPO
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