Probe scanning process and device using an optical imaging system, calibrates the scanning table and uses these stored values in the scan

摘要

A process for scanning a probe (1) on a scanning table (2) using an optical imaging system with a camera or optical measuring device (7) comprises calibrating and storing the scanning table height data, scanning the probe and determining the probe height data with respect to the table data. An Independent claim is also included for a device to carry out the above process.