CLEAN AIR DUCT AND DEVICE FOR PROVIDING AIR FOR CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To provide a clean air duct for a system for cleaning the air of a clean room appropriate for cleaning the air containing a large quantity of fine particles.

SOLUTION: The clean air duct 2 is arranged to transfer the filtered clean air from an air conditioner 300 to a lower end of the clean room, and the filtered clean air has a first concentration of the particles. Each particle filter 106 inside of the clean air duct 302 is positioned in rear of the air conditioning device and in front of the clean room. The clean air having the first concentration of particles is filtered by each filter 106 to supply the clean air having a second concentration of particles smaller than the first concentration of particles to the clean room.

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