THIN-FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thin-film forming apparatus for restraining staining of a discharge face of an electrode, by inhibiting a reactive gas and a discharge gas from mixing in a discharge space.

SOLUTION: The thin film production apparatus is provided with a discharge space in which a first electrode and a second electrode are arranged so as to face each other, and a gas supply means for supplying the discharge gas and the reactive gas respectively and individually into the above discharge space. The reactive gas supply port of the above gas supply port for supplying the above discharge gas and the reactive gas respectively and individually to the above discharge space is arranged at a distance of d satisfying the following expression (1): 0COPYRIGHT: (C)2004,JPO