发明名称 CIRCUIT ELEMENT AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide circuit elements whose characteristics can be controlled independently of a semiconductor layer which is a base. SOLUTION: Many unit resistor elements 306 each of which is formed by connecting 1st metal wires 303 and 2nd metal wires 305 which are connected by through holes 304 whose insides are filled with a resistor material and are three-dimensionally arranged in series. A required resistance value can be obtained by controlling the repeated number of unit resistor elements. The control of the resistance value can be performed independently of a semiconductor layer manufacturing process. Similarly an inductor having required inductance can be formed by connecting many unit inductors in series in the horizontal direction. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004040009(A) 申请公布日期 2004.02.05
申请号 JP20020198207 申请日期 2002.07.08
申请人 RENESAS TECHNOLOGY CORP 发明人 YAMADA KEIICHI
分类号 H01L23/52;H01L21/3205;H01L21/822;H01L27/04;(IPC1-7):H01L21/822;H01L21/320 主分类号 H01L23/52
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