| 摘要 |
PROBLEM TO BE SOLVED: To inspect a blind hole formed on an blank for forming a multilayer substrate with superior precision by using an image recognition technology. SOLUTION: A lamp for projecting light to the blank 21 for forming a multilayer substrate on which a protective film 81 is stuck, a camera for photographing an image of the sticking surface of the protective film 81, and an ECU which inspects the quality of a viahole 24 by using the image on the basis of the difference of reflectivities of light in a part of the viahole 24 and in the protective film 81, are installed. Since coloring is performed in the protective film 81 so as to reduce the reflectivity of light, a clear difference can be generated between reflectivity in the viahole 24 and reflectivity in the protective film 81. As a result, the quality of the viahole 24 such as the size of the viahole 24 and the sticking of foreign particles can be inspected with high precision on the basis of the image photographed by the camera. COPYRIGHT: (C)2004,JPO |
