| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical shape measuring device based on multi-slit scheme which is strong against the optical defocus of an irradiation device in an irradiation device of a three-dimensional optical geometry measuring device. SOLUTION: The device is mainly comprised of an optical shape measuring device that is characterized by having an irradiation means for irradiating a dual density pattern light with different monotone intensity distribution with respect of a base line direction and a multi-slit pattern light with respect to the same base line direction, a photographing means for obtaining the light receiving amount and the light receiving position of a light reflected from a measured object respectively for the irradiated dual density pattern and the multi-slit pattern, and a shape calculating means for estimating each slit number of the multi-slit pattern from the light receiving ratio with respect to the dual density pattern and calculating the shape of the measured object on each slit from the slit number and the slit light receiving position. COPYRIGHT: (C)2004,JPO
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