SUPPLY METHOD OF MATERIAL GAS TO ION SOURCE, AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a supply method of a material gas to an ion source for allowing a gas cylinder to be installed outside a high-voltage part and outside a tank by effectively using an insulating pipe. SOLUTION: This method is used for supplying the material gas to the ion source from the gas cylinder. The gas cylinder is installed in a ground potential part. A material gas supply pipe from the gas cylinder to the ion source is equipped with the insulating pipe in its intermediate part. The material gas is supplied to the ion source from the gas cylinder through the pipe wherein the insulating pipe is spirally formed. COPYRIGHT: (C)2004,JPO