| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control device capable of supplying fluid in an appropriate state by accurately controlling a flow while avoiding the accumulation of the fluid in a device and a circuit having the device. SOLUTION: This flow control device 1 comprises a fluid inlet port 21 and a fluid outlet port 25. A valve element 30 opening and closing a flow passage disposed between these ports is installed in a housing 10. The flow control device also comprises a piston 40 forming a valve element guide means for pushing down or pulling down the valve element 30 to circulate the fluid of a small amount relative to a rated flow into the flow passage. COPYRIGHT: (C)2004,JPO
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