LASER THIN FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a low-cost and a long-life laser thin film forming device capable of uniformly forming the thin film in large area. SOLUTION: A raw material gas is photolyzed by making laser beam incident in a chamber to deposit the thin film S on a substrate 94. A light-emitting part 68 of a laser light source is arranged in line shape along the width direction of the substrate 94. The laser beam is condensed in line shape to the width direction of the substrate 94 by a collimator lens 128 and a cylindrical lens 104 and the beam is irradiated in the form of line beam. Therefore, it is not required to scan the line beam and the thin film is uniformly formed on the whole surface only by moving a moving stage 96 to the arrow A direction. The low-cost and long-life light source is obtained by using a group III nitride based semiconductor laser as the laser light source. COPYRIGHT: (C)2004,JPO