| 摘要 |
PROBLEM TO BE SOLVED: To precisely and sharply process an object pattern. SOLUTION: In a sandblast device composed of a table 6 on which an object to be processed can be set, and a nozzle head 2 having a nozzle 1 capable of blasting a blasted material to the object to be processed, the nozzle head 2 or the table 6 can be moved on a Z-axis in the axial direction of the nozzle, an X-axis and a Y-axis orthogonal to the Z-axis each other. COPYRIGHT: (C)2004,JPO
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