发明名称 SPUTTERING TARGET
摘要 <p>A sputtering target which is formed from a material comprising silicon carbide and silicon, and has a volume percentage of silicon carbide of 50 to 70 %, wherein the volume percentage of silicon carbide is represented by the formula: volume percentage of silicon carbide (%) = total volume of silicon carbide/(total volume of silicon carbide + total volume of silicon) X 100. The sputtering target allows the adjustment over a widened range of the refractive index of the resultant coating layer through the control of the flow rate of an oxygen gas or a nitrogen gas or the control of the electric power to be infused.</p>
申请公布号 WO2004011690(A1) 申请公布日期 2004.02.05
申请号 WO2003JP09096 申请日期 2003.07.17
申请人 BRIDGESTONE CORPORATION;KUMAGAI, SHO;ODAKA, FUMIO;ENDO, SHIGEKI 发明人 KUMAGAI, SHO;ODAKA, FUMIO;ENDO, SHIGEKI
分类号 C23C14/34;(IPC1-7):C23C14/34;C04B35/56 主分类号 C23C14/34
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