| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma processing system for forming a carbon film on the inner surface of a plastic container by using high-frequency plasma capable of simplifying the system and operating procedure, shortening work time and forming a more uniform carbon film, and to provide a method for producing a carbon film-formed plastic container. <P>SOLUTION: The system comprises inserting a first electrode in a plastic container and setting a second electrode so as to surround the outer periphery of the container, applying high-frequency power to the first electrode to generate discharge plasma inside the plastic container and, simultaneously or when generating plasma, bias power is applied to the second electrode to form a coat having gas barrier property inside the plastic container. <P>COPYRIGHT: (C)2004,JPO |
