DESIGN METHOD OF SEMICONDUCTOR DEVICE, DESIGN PROGRAM OF SEMICONDUCTOR DEVICE, AND DESIGN EQUIPMENT OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To design a semiconductor device wherein densities of a dummy pattern and a design pattern are made uniform in all the parts of a semiconductor chip.

SOLUTION: (Step S1) A layout pattern 1a of a layout layer of a semiconductor device is divided into division regions 2a, 2b, ... as shown in a layout pattern 1b. (Step S2) A dummy pattern is inserted between design patterns of the division regions as shown in a division region enlarged view A of a layout pattern 1c. (Step S3) The density of the dummy pattern and the design pattern is calculated for every division region. (Step S4) The pattern rule of the dummy pattern for every division region is changed as shown in a dummy pattern 4b of a division region enlarged view B of a layout pattern 1d so that the density becomes a desired value.

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