发明名称 |
CLEAN AIR SUPPLY SYSTEM AND ITS OPERATION METHOD |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To desorb a gaseous organic impurity of a high performance filter itself in a system in the case where the high performance filter is assembled in a clean air supply system using a rotary adsorption equipment having an adsorbent provided in a rotor. <P>SOLUTION: A ULPA (ultra low penetration airfilter) filter 42 is installed on the downstream side from the rotary adsorption equipment 31 of the final stage and an electric heater 41 is installed on the upstream side from the ULPA filter 42. The air heated by the electric heater 41 is introduced to the high performance filter 42 without positively cooling it. <P>COPYRIGHT: (C)2004,JPO</p> |
申请公布号 |
JP2004033925(A) |
申请公布日期 |
2004.02.05 |
申请号 |
JP20020194955 |
申请日期 |
2002.07.03 |
申请人 |
TAKASAGO THERMAL ENG CO LTD;OMI TADAHIRO |
发明人 |
OTA MUTSUO;NISHIMURA KOICHI;OKUBO YOSHINORI;OMI TADAHIRO;SAITO KAZUO;KUWABARA KENJI;SAITO MASATOSHI |
分类号 |
F24F3/147;B01D53/06;B01D53/26;F24F3/14;(IPC1-7):B01D53/06 |
主分类号 |
F24F3/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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