| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film forming apparatus which restrains staining of a discharge face of an electrode. SOLUTION: In a thin-film forming apparatus having a discharge space in which a first electrode and a second electrode are arranged so as to face each other, this apparatus is characterized in that a length L satisfies L < 500D, where D expresses a space between the facing sides of a substrate to be treated and the first electrode, when the apparatus supplies a discharge gas and a reactive gas to the above discharge space and transfers the substrate while contacting one side of the substrate with the above second electrode, and L expresses the length of the face of the above first electrode in a substrate transferring direction. COPYRIGHT: (C)2004,JPO
|
