INSPECTION DEVICE FOR SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To inspect a semiconductor device at a high speed by using a low-cost and slow-speed LSI inspection device. SOLUTION: The inspection device comprises a clock control circuit 10 generating a test clock signal having a frequency N-times (N is a natural number) of a frequency of an external clock signal CLK in synchronization with the external clock signal supplied from the outside; a pseudo random data generation circuit 20 generating a pseudo random data signal supplied to the semiconductor device 30 to be inspected; and a comparing circuit 40 comparing data outputted from the semiconductor device 30 to be inspected with normal data. The pseudo random data signal is given to the semiconductor device 30 to be inspected to make it operate at a high speed with a operating frequency higher than that of the external clock signal CLK. By comparing the output with the normal data by using the comparing circuit 40, quality decision for the semiconductor device 30 to be inspected is performed. COPYRIGHT: (C)2004,JPO