| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum heating furnace for a FPD capable of heat treatment of a board as even as possible and having excellent productivity. SOLUTION: A plurality of plate-like heaters 22 are provided between a plurality of boards 16, which are supported by supports 20, in nearly parallel with the boards 16, and temperature of these plate-like heaters 22 is controlled by a temperature controller 44 to nearly even each temperature. The heat treatment as even as possible thereby can be performed to the board 16 with radiation from the plate-like heaters 22 in a high-vacuum space formed in a furnace body 12, and temperature accuracy, for example a board surface-inside temperature error is restricted within plus and minus 3°C, is obtained. Since the heat treatment can be performed to a plurality of the boards 16 in one batch, the vacuum heating furnace 10 for a FPD can be provided with excellent productivity. COPYRIGHT: (C)2004,JPO
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