| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for regenerating a protective film of a mold for molding optical glass elements capable of forming the protective film with good durability even by repeating regeneration. SOLUTION: This method for regenerating a protective film of a mold, in which an intermediate layer having carbide and/or nitride films and a protective film of diamond-like carbon are formed on a substrate, for molding optical glass elements comprises (a) a stripping step of the protective film by plasma etching, (b) another stripping step of the intermediate layer (carbide and/or nitride films) by etching using a stripper liquid containing hydrogen peroxide, and (c) a step for newly forming the intermediate layer and the protective film on the substrate. COPYRIGHT: (C)2004,JPO
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